Component placement device as well as a method for picking up a component and placing a component on a substrate

ABSTRACT

A component placement device for picking up a component and placing a component on a substrate device comprises a holder which is movable at least in a main direction, as well as a nozzle for picking up a component. The nozzle is movable at least in a direction opposite the main direction relative to the holder. The component placement device comprises a fluid flow channel which opens or closes upon movement of the nozzle in the direction opposite the main direction relative to the holder, detection means for detecting the opening or closing of the fluid flow channel as well as means for controlling the movement of the holder in at least the main direction on the basis of a signal delivered by the detection means concerning the opening or closing of the fluid flow channel.

CROSS-REFERENCE TO RELATED APPLICATION

This application claims priority to Dutch Patent Application No. 2013584filed on Oct. 7, 2014, the disclosure of which is hereby incorporated byreference in its entirety.

FIELD OF THE INVENTION

The invention relates to a component placement device for picking up acomponent and placing a component on a substrate, which componentplacement device comprises a holder which is movable at least in a maindirection, as well as a nozzle for picking up a component, which nozzleis movable relative to the holder at least in a direction opposite tothe main direction.

The invention also relates to a method for picking up a component andplacing a component on a substrate using such a component placementdevice.

BACKGROUND OF THE INVENTION

Such component placement devices are known per se, they are used for,inter alia, picking up electronic components from a component supplyingdevice, moving the component to a desired position above a substrate andplacing the component at the desired position on the substrate. Thepicking up of the component takes place by means of a nozzle, which isfor example connected to a vacuum source for creating a partial vacuumin the nozzle. To ensure that the component is picked up correctly, thenozzle must be moved into contact with the outer surface of thecomponent. For this purpose the holder is moved in the main direction,and once the nozzle comes into contact with the component, the nozzle ismoved against spring force in a direction opposite the main directionrelative to the holder. The object of this relative movement is toprevent damage to the nozzle and/or to the component. In a similarmanner, the holder is moved in the main direction upon placement of thecomponent on the substrate, with the nozzle and the component beingmoved in a direction opposite the main direction relative to the holderonce the component carried by the nozzle comes into contact with thesubstrate.

Usually the holder is moved a predetermined distance in the maindirection. However, if components of the same type have differentthicknesses, for example due to manufacturing tolerances, if thesubstrate is irregular in thickness or partially warped, the movement ofthe nozzle relative to the holder will not be constant, nor will thespring force exerted on the component be constant. Thus there is a riskthat the force exerted on the component will be too great, which maylead to damage to the component. Furthermore it is possible that thecomponent will not touch the substrate at all at the moment when thecomponent is released, in which case the force exerted on the componentwill be too small. When the component is placed in soldering compound ordots of adhesive, the component must be pressed into said compound oradhesive with sufficient force. With the existing component placementdevices there is a risk that the force will be too small, as aconsequence of which the component will not be pressed into thesoldering compound or dots of adhesive with sufficient force.

SUMMARY OF THE INVENTION

The object of the invention is to provide a component placement deviceby means of which a component can be picked up and placed in a precisemanner whilst preventing undesirable forces being exerted on thecomponent.

This object is achieved in the component placement device according tothe invention in that the nozzle is provided with a passage connected toa vacuum source and to at least one opening of a component pick-up part,which nozzle is also provided with an opening in a wall of the nozzlelocated between the vacuum source and the at least one opening, whichopening is in open communication with the passage, wherein the holder isprovided with a channel which is in communication with the opening andthe passage via a closable connection, wherein a fluid flow channelcomprising at least part of the passage, the opening and the channel isbeing opened or closed by the nozzle at the closable connection uponmovement of the nozzle relative to the holder in the direction oppositeto the main direction, the component placement device further comprisesdetection means for detecting the opening or closing of the fluid flowchannel as well as means for controlling the movement of the holder inat least the main direction on the basis of a signal delivered by thedetection means concerning the opening or closing of the fluid flowchannel.

Once the nozzle is moved in the direction opposite the main directionrelative to the holder, the fluid flow channel will be opened, forexample, and flow of fluid will take place through the fluid flowchannel. This flow of fluid is detected by detection means. Thedetection means may comprise a pressure sensor or a flow sensor, forexample, by means of which a change in the flow of fluid is detected.The detection means further comprise a microprocessor, for example, bymeans of which it is detected, on the basis of a signal delivered by thesensor, that the fluid flow channel is open and the nozzle is beingmoved in the direction opposite the main direction relative to theholder. Subsequently, using the means for controlling the movement ofthe holder in the main direction, the movement of the holder in the maindirection is stopped, continued over a predetermined distance orcontinued otherwise. In this way it is no longer of importance for thecorrect and precise picking up or placement of the component that thethickness of the component and/or height variation of the substrate beknown in advance or be constant.

When the fluid flow channel is closed upon movement of the nozzle in thedirection opposite the main direction relative to the holder, flow offluid through the fluid flow channel will be interrupted, which will bedetected by the sensor. Subsequently the movement of the holder in themain direction will be controlled on the basis of the signal deliveredby the sensor.

The fluid may be air, another type of gas or a liquid.

In the case of a closed closable connection, a partial vacuum prevailsin the passage through the vacuum source, whilst the pressure in thechannel will be ambient pressure. By opening the closable connection,the passage is placed in open communication with the channel in theholder via the opening, as a result of which flow of fluid will takeplace from the channel to the passage and the pressure in the passagewill increase. The change in the pressure or the fluid flow can bedetected by means of a sensor.

In the case of an open closable connection, a partial vacuum willprevail in the passage through the vacuum source, and flow of fluid willtake place from the channel to the passage via the opening. Once theclosable connection is closed, the pressure in the passage will fall,the flow of fluid in the passage will change and the flow of fluidthrough the channel will decrease. The change in the pressure or theflow of fluid can be detected by means of a sensor.

One embodiment of the component placement device according to theinvention is characterised in that the fluid flow channel will open uponmovement of the nozzle in the direction opposite the main directionrelative to the holder.

In this embodiment, flow of fluid only takes place during movement ofthe nozzle in the direction opposite the main direction relative to theholder, so that the amount of fluid needed for detecting movement of thenozzle relative to the holder is limited.

A further embodiment of the component placement device according to theinvention is characterised in that the passage extends through acomponent pickup part of the nozzle, wherein the fluid flow resistanceof the passage in the component pickup part is greater than the jointfluid flow resistance of the opening in the wall of the nozzle and thechannel in the holder.

As a result, fluid will readily flow through the opening in the wall ofthe nozzle and the channel in the holder upon opening or closing of theclosable connection, which flow of fluid and the pressure change causedthereby can be easily detected by means of a sensor.

This is important in particular upon taking up the component, when apartial vacuum is already created in the passage prior to the contactbetween the nozzle and a component, wherein, due to the greater fluidflow resistance, only a small amount of fluid will flow into the passagethrough the passage in the component pickup part.

Another embodiment of the component placement device according to theinvention is characterised in that the nozzle is movable against springforce in the direction opposite the main direction relative to theholder.

Upon placement of the component, the nozzle can move against springforce relative to the holder, as a result of which the spring force willalso be exerted between the component and the substrate. In this way thecomponent is pressed against the substrate with a predetermined forceupon being placed.

As a result of the spring force, the nozzle is pressed in the maindirection to a fixed starting position relative to the holder uponmovement of the component placement device from a component pickupposition to the position above the substrate, in which starting positionthe fluid flow channel is closed or open.

Another embodiment of the component placement device according to theinvention is characterised in that the nozzle is connected to the holderby means of two leaf springs.

Using such leaf springs, a precise guidance for moving the nozzle in themain direction and in the opposite direction relative to the holder canbe realised in a simple manner.

The invention also relates to a method for picking up a component andplacing a component on a substrate using a component placement device asdescribed in the foregoing.

The object of the invention is to provide a method by means of which acomponent can be picked up and placed in a precise manner whilstpreventing undesirable forces being exerted on the component.

This object is achieved with the method according to the invention inthat the nozzle is provided with a passage connected to a vacuum sourceand to at least one opening of a component pick-up part, which nozzle isalso provided with an opening in a wall of the nozzle located betweenthe vacuum source and the at least one opening, which opening) is inopen communication with the passage, wherein the holder is provided witha channel which is in communication with the opening and the passage viaa closable connection, wherein a fluid flow channel comprising at leastpart of the passage, the opening and the channel is being opened orclosed by the nozzle at the closable connection upon movement of thenozzle relative to the holder in the direction opposite the maindirection, wherein the holder is moved in the main direction, in thedirection of the component upon picking up of the component or in thedirection of the substrate upon placement of the component on thesubstrate, until the nozzle comes into contact with the component uponpicking up the component or until the component comes into contact withthe substrate) upon placement of the component, after which, uponfurther movement of the holder in the main direction, the nozzle ismoved relative to the holder in the direction opposite to the maindirection, wherein the fluid flow channel of the component placementdevice is opened or closed, which opening or closing is detected bydetection means, after which further movement of the holder in at leastthe main direction is controlled on the basis of a signal delivered bythe detection means regarding the opening or closing of the fluid flowchannel.

Once the nozzle is moved in the direction opposite the main directionrelative to the holder, the fluid flow channel will be opened or closed,and flow of fluid will take place through the fluid flow channel or theflow of fluid will be interrupted, as the case may be. The flow of fluidor the resulting pressure change will be detected by the detectionmeans, which determine that the nozzle is being moved in the directionopposite the main direction relative to the holder. The movement of theholder in the main direction is then stopped, continued over apredetermined distance or continued otherwise. In this way it is nolonger of importance for the correct and precise picking up or placementof the component that the thickness of the component and/or the exactheight of the substrate be known in advance or be constant. Furthermore,the moment of contact between the nozzle and the component upon pickingup the component and the moment of contact between the component and asubstrate upon placement of the component on the substrate can bequickly and precisely determined in this way.

One embodiment of the method according to the invention is characterisedin that the further movement of the holder in the main direction isstopped on the basis of a signal delivered by the detection meansregarding the opening or closing of the fluid flow channel.

As a result, the picking up and/or placement of the component can takeplace with minimal force.

Another embodiment of the method according to the invention ischaracterised in that the holder is moved a predetermined distance inthe main direction on the basis of a signal delivered by the detectionmeans regarding the opening or closing of the fluid flow channel.

In this way the component can be picked up and/or placed in a controlledmanner with a predetermined force.

Another embodiment of the method according to the invention ischaracterised in that the fluid flow channel is opened upon movement ofthe nozzle in the direction opposite the main direction relative to theholder.

Flow of fluid will only take place upon movement of the nozzle in thedirection opposite the main direction relative to the holder, so thatthe amount of fluid needed for detecting movement of the nozzle relativeto the holder is limited.

BRIEF DESCRIPTION OF THE DRAWINGS

The invention will now be explained in more detail with reference to thedrawing, in which:

FIGS. 1A and 1B are a cross-sectional view and a detail view,respectively, of a first embodiment of a component placement deviceaccording to the invention;

FIG. 2 is a view of the component placement device of FIG. 1A while thecomponent is being moved to a desired position on a substrate;

FIG. 3 is a view of the component placement device of FIG. 1A during theplacement of the component at a desired position on a substrate;

FIG. 4 is a schematic diagram for controlling the movement of the holderof the component placement device shown in FIG. 1A;

FIGS. 5A and 5B are views of a second embodiment of a componentplacement device according to the invention while the component is beingmoved to a desired position on a substrate and while the component isbeing placed at a desired position on a substrate, respectively;

Like parts are indicated by the same numerals in the figures.

DESCRIPTION OF THE DRAWINGS

FIGS. 1A and 1B show a cross-sectional view and a detail view,respectively, of a component placement device 1 according to theinvention. The component placement device comprises a holder 2, which ismovable at least in a main direction indicated by arrow P1, and also anozzle 3 for picking up a component 4. The nozzle 3 is movable relativeto the holder 2 at least in a direction opposite the main direction, asindicated by the arrow P2. The directions indicated by the arrows P1, P2extend parallel to a central axis 5.

The holder 2 has a cylindrical housing 6, which is closed at an upperside and a bottom side by an upper wall 7 and a lower wall 8,respectively. The holder 2 is provided with a pipe 9 in the upper wall 7of the holder 2, which pipe 9 is connected to a vacuum source (notshown). The lower wall 8 is provided with an opening 9, through whichthe nozzle 3 extends. The cylindrical housing 6 accommodates acylindrical element 10, through which the nozzle 3 extends. Thecylindrical housing 6, the upper wall 7 and the cylindrical element 10define a vacuum chamber 11. The cylindrical element 10 comprises acylindrical chamber 12, which is in open communication with theenvironment via a number of channels 13 that extend transversely to thecentral axis 5 and through the cylindrical housing 6. Accordingly,normal ambient pressure prevails in the cylindrical chamber 12. Asealing ring 14 having an inner diameter D1 is provided in thecylindrical chamber 12, on a side near the lower wall 8. The innerdiameter D1 is for example 5-10 mm, for example 7 mm.

The nozzle 3 comprises a tube 15 extending along the central axis 5,which defines a passage 16. The tube 15 has an outer diameter D2. Theouter diameter D2 is for example 3-8 mm, for example 5 mm. Provided in awall of the tube 15 are a number of openings 17, which open into thecylindrical chamber 12. In the cylindrical chamber 12, the tube 15 isprovided with an external flange 18.

At the upper side, the passage 16 opens into the vacuum chamber 11. Nearthe upper side, the tube 15 is provided with an external flange 20. Abiased spring 19 is provided between the flange 20 and the upper wall 7,which spring urges the nozzle 3 in the direction indicated by the arrowP1, causing the external flange 18 to be pressed against the sealingring 14. The diameters D1 and D2 are preferably such that D2*D2approximately equals D1*D1−D2*D2, so that the forces acting on theflange 18 and the nozzle 3 as a result of the partial vacuum and theambient pressure substantially cancel out one another.

Near the bottom side, the tube 15 is provided with a component pickuppart 21, which is provided with one or more narrow passages 21′, whichare connected to the passage 16 and which are in open communication withthe environment. The component pickup part 21 has an outer diameter D3on a side remote from the tube 15. The outer diameter D3 depends on thesize of the component to be picked up; in practice it will often rangebetween the 0.1 and 3 mm.

The nozzle 3 is connected to an inner wall 23 of the cylindrical housing6 of the holder 2 by means of two leaf springs 22. The leaf springs 22are provided below the flange 20 in the vacuum chamber 11 and below thecylindrical element 10 near the lower wall 8.

As shown in FIG. 1B, the leaf spring 22 comprises an outer ring 24,which is provided with three projections 25, which are connected to theinner wall 23 of the cylindrical housing 6 of the holder 2. The leafspring 22 further comprises an inner ring 26, which is provided withthree projections 27, which are connected to the outer wall 28 of thetube 15 of the nozzle 3. Located between the outer ring 24 and the innerring 26 are a number of rings 29, which are connected to adjacent rings24, 26, 29 via bridge segments 30. The pair of leaf springs 22 forms agood lineair guide for the nozzle 3 in relation to the holder 2.

FIG. 2 shows the component placement device 1 while the component 4 isbeing moved, by driving means known per se (not shown), to a desiredposition on a substrate 31. As a result of the partial vacuum created inthe passages 16, 21′ by means of the vacuum source via the vacuum line9, a component 4 is held by the component pickup part 21. The component4 has for example been picked up from a component supplying device thatis known per se. While the component placement device 1 is being movedfrom the component supplying device near the desired position on thesubstrate 31, the nozzle 3 is pressed in the main direction indicated bythe arrow P1 by the spring 19, causing the external flange 18 to bepressed against the sealing ring 14. The openings 17 open into a space32 enclosed by the cylindrical element 10, the flange 18 and the sealingring 14, so that the fluid connection between the passage 16 and thechannels 13 is closed. Once the component 4 is present above the desiredposition on the substrate 31, the component placement device 1 will bemoved in the main direction indicated by the arrow P1.

At some point the component 4 will touch the substrate 31, as a resultof which the component 4 and the nozzle will no longer be moved in themain direction indicated by the arrow P1. The holder 2, on the otherhand, will move further against spring force in the main directionindicated by the arrow P1, so that the nozzle 3 will be moved in adirection opposite the main direction relative to the holder 2, asindicated by the arrow P2. See FIG. 3. The flange 18 is moved away fromthe sealing ring 14, so that simultaneously an open fluid connectionthrough the channels 13, the chamber 12, the openings 17 and the passage16 is formed. The channels 13, the chamber 12, the openings 17 and thepassage 16 form the fluid flow channel. As a result of this open fluidconnection in the fluid flow channel, flow of fluid to the vacuum sourcewill be started through the pipe 9 in the direction indicated by thearrows P3. In this pipe 9 a sensor 33 (schematically indicated in FIG.4) is provided, by means of which the pressure or flow of the fluid,such as air, can be detected both in the case of a closed fluidconnection (FIG. 2) and in the case of an open fluid connection (FIG.3). The joint fluid flow resistance of the passages 21′ in the componentpickup part 21 is greater than the joint fluid flow resistance of theopenings 17 in the nozzle 3 and the channels 13 in the holder 2, so thata change of the pressure or flow of the fluid can be detected relativelyquickly.

Subsequently, further movement of the holder 2 in the main directionindicated by the arrow P1 is controlled on the basis of the signaldelivered by the sensor 33.

The press-on force acting on the component 4 in FIG. 3 depends on thespring characteristic of the spring 19 and the relative movement of thenozzle 3 relative to the holder 2. The relative movement is in the orderof 1 mm, for example 0.3 mm.

FIG. 4 shows a schematic diagram of a control circuit 41 for controllingthe movement of the holder 2 of the component placement device 1. Thecontrol circuit 41 comprises the sensor 33, a motor 42 for moving theholder 2 in the directions indicated by the arrows P1, P2, a positionsensor 43 for determining the number of steps by which the holder 2 hasbeen moved in the direction indicated by the arrows P1, P2, an ADconverter ADC connected to the sensor 33 for converting the signaldelivered by the sensor 33 into a digital signal, a microprocessor MC, acounter CNT connected to the position sensor 43 for determining thenumber of steps by which the holder 2 has been moved in the directionsindicated by the arrows P1, P2. The control circuit 41 further comprisesa unit 44 connected between the microprocessor MC and the motor 42 fordriving the motor 42. The AD converter ADC converts the signal deliveredby the sensor 33 and feeds it to the microprocessor MC. Furthermore, thesignal from the position sensor 43 is fed to the microprocessor MC bythe counter CNT. Based on the signal received from the AD converter ADC,the microprocessor MC determines whether the nozzle 3 is being moved inthe direction indicated by the arrow P2 relative to the holder, and alsothe manner in which the holder 2 is subsequently to be moved. Themovement of the holder 2 can be stopped, continued in the directionindicated by the arrow P1 or be continued in the direction indicated bythe arrow P2. The microprocessor MC subsequently delivers a signal tothe motor 42, via the unit 44, for moving the holder 2 in the desiredmanner. The control circuit 41 comprises the detection means fordetecting the opening or closing of the fluid flow channel and the meansfor controlling the movement of the holder in at least the maindirection.

FIGS. 5A and 5B are views of a second embodiment of a componentplacement device 51 according to the invention while the component isbeing moved 4 to a desired position on a substrate 31 and while thecomponent 4 is being placed at a desired position on a substrate 31,respectively. The component placement device 51 in large measurecorresponds to the component placement device 1. The essentialdifference is that the nozzle 53 is provided with openings 57, which, inthe extended position of the nozzle 53 relative to the holder 2 shown inFIG. 5A, are located near the upper side of the cylindrical chamber 12.The openings 57 are in open communication with the channels 13. Thechannels 13, the chamber 12, the openings 57 and the passage 16 form thefluid flow channel. As a result of this open fluid connection in thefluid flow channel, flow of fluid to the vacuum source will be startedthrough the pipe 9 in the direction indicated by the arrows P5.

Once the component 4 touches the substrate 31 upon placement of thecomponent 4 on the substrate 31, the nozzle 53 will be moved in thedirection indicated by the arrow P2 relative to the holder 2 against thespring force of the spring 19. At the same time, the openings 57 in thecylindrical element 10 will come to be located in the cylindricalelement 10 and flow of fluid through the openings 57 will be reduced orbe stopped altogether by the cylindrical wall 59 of the cylindricalelement 10 opposite the openings 57. The fluid connection is nowconsidered to be closed. A sensor is provided in the pipe 9, by means ofwhich sensor the pressure or flow of the fluid, such as air, can bedetected both in the case of an open fluid connection (FIG. 5A) and inthe case of a closed fluid connection (FIG. 5B).

In a similar manner as in the situation in which a component 4 is placedon a substrate 31, it is possible to determine the moment of contactbetween the nozzle 3, 53 and the component 4 upon picking up a component4 from a component pickup position by moving the nozzle 3, 53 relativeto the holder 2, the attendant opening or closing of a fluid connectionand the detection of a change in the pressure or the flow of fluid.

It is also possible to provide a precise lineair guidance other thanthrough the use of leaf springs 22.

Instead of being cylindrical in shape, the housing 6 and the element 10may also have a rectangular or other shape.

It is also possible that the joint fluid flow resistance of the passages21′ in the component pickup part 21 is smaller than the joint fluid flowresistance of the openings 17 in the nozzle 3 and the channels 13 in theholder 2. The difference between the joint fluid flow resistance of thepassages 21′ in the component pickup part 21 and the joint fluid flowresistance of the openings 17 in the nozzle 3 and the channels 13 in theholder 2 must be large enough, so that the pressure difference or thedifference in fluid flow that occurs when a nozzle does not carry acomponent, when a component is being picked up and when the nozzle ismoved in the holder makes it possible to distinguish the differentsituations from each other.

It is also possible that the opening or closing of the fluid flowchannel will not take place until the nozzle has been moved apredetermined distance relative to the holder.

In the case of a relatively long movement of the nozzle relative to theholder it is also possible to successively open or close more channels,so that different changes in pressure of fluid flow will occur. Thesechanges will be detected by the detection means, from which detectionthe movement of and/or the force on the nozzle can subsequently bederived.

LIST OF REFERENCE NUMERALS

-   1 component placement device-   2 holder-   3 nozzle-   4 component-   5 central axis-   6 housing-   7 upper wall-   8 lower wall-   9 pipe-   10 element-   11 vacuum chamber-   12 chamber-   13 channel-   14 sealing ring-   15 tube-   16 passage-   17 opening-   18 flange-   19 spring-   20 flange-   21 component pickup part-   21′ passage-   22 leaf spring-   23 inner wall-   24 outer ring-   25 projection-   26 inner ring-   27 projection-   28 outer wall-   29 ring-   30 bridge segment-   31 substrate-   32 space-   33 sensor-   41 control circuit-   42 motor-   43 position sensor-   44 unit-   51 component placement device-   53 nozzle-   57 opening-   59 wall-   ADC AD converter-   CNT counter-   D1 inner diameter-   D2 inner diameter-   MC micro-processor-   P1 arrow-   P2 arrow-   P3 arrow-   P5 arrow

The invention claimed is:
 1. A component placement device for picking upa component and placing a component on a substrate, which componentplacement device comprises a holder which is movable at least in a maindirection, as well as a nozzle for picking up a component, which nozzleis movable relative to the holder at least in a direction opposite themain direction, characterised in that the nozzle is provided with apassage connected to a vacuum source and to at least one opening of acomponent pick-up part, which nozzle is also provided with an opening ina wall of the nozzle located between the vacuum source and the at leastone opening, which opening is in open communication with the passage,wherein the holder is provided with a channel which is in communicationwith the opening and the passage via a closable connection, wherein afluid flow channel comprising at least part of the passage, the openingand the channel is being opened or closed by the nozzle at the closableconnection upon movement of the nozzle relative to the holder in thedirection opposite to the main direction, the component placement devicefurther comprises detection means for detecting the opening or closingof the fluid flow channel as well as means for controlling the movementof the holder in at least the main direction on the basis of a signaldelivered by the detection means concerning the opening or closing ofthe fluid flow channel.
 2. The component placement device according toclaim 1, characterised in that the fluid flow channel will open uponmovement of the nozzle in the direction opposite the main directionrelative to the holder.
 3. The component placement device according toclaim 2, characterised in that the passage extends through a componentpickup part of the nozzle, wherein the fluid flow resistance of thepassage in the component pickup part is greater than the joint fluidflow resistance of the opening in the wall of the nozzle and the channelin the holder.
 4. The component placement device according to claim 1,characterised in that the passage extends through a component pickuppart of the nozzle, wherein the fluid flow resistance of the passage inthe component pickup part is greater than the joint fluid flowresistance of the opening in the wall of the nozzle and the channel inthe holder.
 5. The component placement device according to claim 1,characterised in that the nozzle is movable against spring force in thedirection opposite the main direction relative to the holder.
 6. Thecomponent placement device according to claim 1, characterised in thatthe nozzle is connected to the holder by means of two leaf springs.
 7. Amethod for picking up a component and placing a component on a substrateusing a component placement device according to claim 1, which componentplacement device comprises a holder which is movable at least in a maindirection, as well as a nozzle for picking up a component, which nozzleis movable relative to the holder at least in a direction opposite themain direction, characterised in that the nozzle is provided with apassage connected to a vacuum source and to at least one opening of acomponent pick-up part, which nozzle is also provided with an opening ina wall of the nozzle located between the vacuum source and the at leastone opening, which opening is in open communication with the passage,wherein the holder is provided with a channel which is in communicationwith the opening and the passage via a closable connection, wherein afluid flow channel comprising at least part of the passage, the openingand the channel is being opened or closed by the nozzle at the closableconnection upon movement of the nozzle relative to the holder in thedirection opposite the main direction, wherein the holder is moved inthe main direction, in the direction of the component upon picking up ofthe component or in the direction of the substrate upon placement of thecomponent on the substrate, until the nozzle comes into contact with thecomponent upon picking up the component or until the component comesinto contact with the substrate upon placement of the component, afterwhich, upon further movement of the holder in the main direction, thenozzle is moved relative to the holder in the direction opposite to themain direction, wherein the fluid flow channel of the componentplacement device is opened or closed, which opening or closing isdetected by detection means, after which further movement of the holderin at least the main direction is controlled on the basis of a signaldelivered by the detection means regarding the opening or closing of thefluid flow channel.
 8. The method according to claim 7, characterised inthat the further movement of the holder in the main direction is stoppedon the basis of a signal delivered by the detection means regarding theopening or closing of the fluid flow channel.
 9. The method according toclaim 7, characterised in that the holder is moved a predetermineddistance in the main direction on the basis of a signal delivered by thedetection means regarding the opening or closing of the fluid flowchannel.
 10. The method according to claim 7, characterised in that thefluid flow channel is opened upon movement of the nozzle in thedirection opposite the main direction relative to the holder.